論文掲載：MDPI Micromachines
T. Tsukada, R. Takigawa, Y. Hasegawa, M. S. Al Farisi, M. Shikida, Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor using Flexible Copper on Polyimide Substrate, Micromachines, Vol. 14, 1, 42 (2023), DOI: 10.3390/mi14010042
