国際会議 The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2021)に2件採択されました。

[1] MEMS flow sensor capable of measuring multi-vital signs of respiration, heart rate, and body temperature, Y. Hasegawa, S. Lee, M. Matsushima, S. Hasegawa, T. Kawabe, M. Shikida
[2] Fully CMOS-compatible wafer bonding based on press marking using thick electroplated aluminum, M. S. Al Farisi, T. Tsukamoto, S. Tanaka