2023年度2022年度2021年度2020年度2019年度2018年度2017年度2016年度2015年度2014年度

学術論文(Journal paper)

(1) M. S. Al Farisi, Y. Wang, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement, IEEE Sensors Journal, Vol. 23, No. 12, pp. 12626–12633 (2023), DOI: 10.1109/JSEN.2023.3272310 (Preprint: TechRxiv:22720810)

(2) M. S. Al Farisi, Y. Wang, Y. Hasegawa, M. Shikida, Facile Packaging for Fiber-Shaped Flexible MEMS Thermal Accelerometer, IEEE Sensors Letters, Vol. 7, No. 11, p. 2504704 (2023), DOI: 10.1109/LSENS.2023.3326122 (Preprint: TechRxiv:24312913)

(3) A. Miyawaki, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Pitot Tube Sensor Probe System for Simultaneous Airflow and Pressure Measurement of Expiration Inside Pulmonary Airway, IEEJ Transactions on Electrical and Electronic Engineering, Vol. 19, No. 5, accepted (2024), DOI: 10.1002/tee.24039

(4) K. Horie, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Investigation of Calibration Methodology Using Mouth Airflow for Wearable Sensor Toward Quantitative Respiration Monitoring, IEEJ Transactions on Electrical and Electronic Engineering, Vol. 19, No. 5, accepted (2024), DOI: 10.1002/tee.24045

国際会議(International Conference)

(1) M. S. Al Farisi, Y. Wang, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, In-tube-center packaging of flexible MEMS airflow-rate sensor and its sensitivity enhancement, The 22th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers), Kyoto, Japan, 25–29 June 2023, pp. 800–803.

(2) K. Horie, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Calibration method for wearable sensor using airflow at mouth for quantitative monitoring of respiration and heartbeat, The 22th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers), Kyoto, Japan, 25–29 June 2023, pp. 1872–1875.

(3) A. Miyawaki, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Simultaneous airflow and pressure measurements based on pitot tube for evaluation of expired air inside lung airway, The 22th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers), Kyoto, Japan, 25–29 June 2023, pp. 1888–1891.

(4) M. S. Al Farisi, S. Toyota, Y. Hasegawa, M. Shikida, Laser Processing for Time Response Enhancement of Flexible MEMS Thermal Sensors, The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), Sapporo, Japan, 14–17 November 2023, p. 17D-1-4.

(5) S. H. Lee, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Embedding Airflow Sensing Function in Balloon Catheter for Respiration Measurement in Bronchus Region Inside Lung, The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), Sapporo, Japan, 14–17 November 2023, p. 17D-1-5.

(6) R. Nagayama, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Tracheal Intubation Tube with Embedded Flow Sensor for Respiration and Heartbeat Monitoring During Canine Tartar Removal, The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), Sapporo, Japan, 14–17 November 2023, p. 17P-1-61.

学術論文(Journal paper)

(1) M. S. Al Farisi, T. Tsukamoto, S. Tanaka, Electroplated Al Press Marking for Wafer-Level Bonding, Micromachines, Vol. 13, 8, 1221, (2022), DOI: 10.3390/mi13081221

(2) Y. Hasegawa, C. Shimohira, M. Matsushima, T. Sugiyama, T. Kawabe, M. Shikida, Development of MEMS Flow and Pressure Sensor Device for Detection of Extravasation at an Early Stage, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, (2022), DOI: 10.1002/tee.23706

(3) T. Tsukada, R. Takigawa, Y. Hasegawa, M. S. Al Farisi, M. Shikida, Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor using Flexible Copper on Polyimide Substrate, Micromachines, Vol. 14, 1, 42 (2023), DOI: 10.3390/mi14010042

(4) T. Tsukada, Y. Hasegawa, M. S. Al Farisi, M. Matsushima, T. Kawabe, M. Shikida, Analysis of Airstream Inside the Slip Joint of Tracheal Intubation Tube for Breathing Measurement, 電気学会論文誌E, Vol. 143, 1, 6–12 (2023), DOI: 10.1541/ieejsmas.143.6

国際会議(International Conference)

(1) T. Tsukada, Y. Hasegawa, M. S. Al Farisi, S. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Wireless MEMS Thermal Flow Sensor System Integrated on Medical Mask for Emergency Medical Treatment, Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT2022), Online, 29 May – 1 June, 2022

学術論文(Journal paper)

(1) H. Yoshida, Y. Hasegawa, M. Matsushima, T. Sugiyama, T. Kawabe, M. Shikida, Miniaturization of Respiratory Measurement System in Artificial Ventilator for Small Animal Experiments to Reduce Dead Space and Its Application to Lung Elasticity Evaluation, Sensors (MDPI), 21, 15, 5123, (2021), DOI: 10.3390/s21155123

(2) Mitsuhiro Shikida, Yoshihiro Hasegawa, Muhammad Salman Al Farisi, Miyoko Matsushima and Tsutomu Kawabe, Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors, Japanese Journal of Applied Physics, Vol.61, (2021);DOI: 10.35848/1347-4065/ac305d

(3) Yoshihiro Hasegawa, Hayato Noma, Miyoko Matsushima, Shin Hasegawa, Tsutomu Kawabe, Mitsuhiro Shikida, Wireless Stent Flow Sensor System for the Evaluation of Breathing Airflow in the Airway of Experimental Animals, 電気学会論文誌E, Vol.142, (2022)1,2-7; DOI: 10.1541/ieejsmas.142.2

(4) Muhammad Salman Al Farisi, Takashiro Tsukamoto, Shuji Tanaka, Mechanical hardening of electrochemically deposited aluminum from chloroaluminate ionic liquid, Scripta Materialia, Vol.21, May 2022, 114599, (2022);DOI: 10.1016/j.scriptamat.2022.114599

国際会議(International Conference)

(1) M. S. Al Farisi, T. Tsukamoto, S. Tanaka, Electrochemically Deposited Aluminum for MEMS Thermal Actuator, Smart Systems Integration Conference 2021, Online, 27-29 April 2021

(2) Y. Hasegawa, S. Lee, M. Matsushima, S. Hasegawa, T. Kawabe, M. Shikida, MEMS flow sensor capable of measuring multi-vital signs of respiration, heart rate, and body temperature, The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2021), Online, 20-25 June 2021, B2-209b

(3) M. S. Al Farisi, T. Tsukamoto, S. Tanaka, Fully CMOS-compatible wafer bonding based on press marking using thick electroplated aluminum, The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2021), Online, 20-25 June 2021, B3-332i

(4) Shihe Wang, Muhammad Salman Al Farisi, Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka, Dual-Mass Resonator with Dynamically Balanced Structure for Roll/Pitch Rate Integrating Gyroscope, IEEE Sensors2021, Online, 31 Oct – 4 Nov 2021, B2P-15-1

学術論文(Journal paper)

(7) M. Sakamoto, Y. Hasegawa, M. Shikida, Development of spear-shaped microneedle and applicator for tip insertion into artificial skin, Microsystem Technologies, 27, 3907-3916 (2021), DOI: 10.1007/s00542-020-05195-9

(6) Y. Kawamoto, Y. Maeda, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida , Development of sensor-probe system with function of measuring flow and pressure for evaluating breathing property at airway in lungs, Microsystem Technologies, (2021), DOI 10.1007/s00542-020-05201-0

(5) H. Noma, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat, Journal of Micromechanics and Microengineering, (2020), DOI: 10.1088/1361-6439/abd07a.

(4) H. Yoshida, Y. Hasegawa, M. Matsushima, T. Sugiyama, T. Kawabe, M. Shikida, Micro-machined respiratory monitoring system development for artificial ventilator in animal experiment, Microsystem Technologies, (2020), DOI 10.1007/s00542-020-04844-3

(3) Y. Maeda, C. Okihara, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Sugiyama, T. Kawabe, M. Shikida, Catheter sensor system for in-situ breathing and optical imaging measurements at airway in inside of lung, Microsystem Technologies, (2020), DOI 10.1007/s00542-020-04843-4

(2) C. Shimohira, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Development of micromachined flow sensor for drip infusion system, Microsystem Technologies, (2020), DOI 10.1007/s00542-020-04839-0

(1) A. Kato, Y. Hasegawa, K. Taniguchi, M. Shikida, Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film, Microsystem Technologies, (2020), DOI 10.1007/s00542-020-04821-w

国際会議(International Conference)

(5) (invited)M. Shikida, Y. Hasegawa, M. Matsushima, T. Kawabe, MEMS devices in vital signs measurements for medical application, Proceedings of 13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021), Online, Japan, 7-11 March, 2021

(4) M. Sakamoto, Y. Hasegawa, M. Shikida, Development of Spear-Shaped Tip-Separable Microneedle Device with Guide Tube for TransDermal Drug Delivery System, Proceedings of 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online, 9-12 Nov, 2020, 2020-5-24

(3) C. Shimohira, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Evaluation of Mems Thermal Flow Sensor in Medical Drip Infusion System, Proceedings of 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online, 9-12 Nov, 2020, 2020-5-19

(2) H. Noma, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Stent Sensor Device with Protective Biodegradable Shell Structure, Proceedings of 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online, 9-12 Nov, 2020, 2020-5-13

(1) Y. Kawamoto, Y. Maeda, Y. Hasegawa, M. Miyoko, T. Kawabe, M. Shikida, Development of Probe-Shaped Pressure Sensor Device for Measuring Pressure Drop at Airway in Lung, Proceedings of 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online, 9-12 Nov, 2020, 2020-5-9

学術論文(Journal paper)

(5) Y. Hasegawa, Y. Yasuda, K. Taniguchi, M. Shikida, Fabrication method with high-density, high-height microneedle using microindentation method for drug delivery system, Microsystem Technologies, (2019), DOI:10.1007/s00542-019-04571-4

(4) M. Kurosawa, K. Taniguchi, H. Momose, M. Sakaguchi, M. Kamijo, A. Nishikawa, Simultaneous Measurement of Ear Canal Movement, Electromyography of the Masseter Muscle and Occlusal Force for Earphone-Type Occlusal Force Estimation Device Development, Sensors, 19(15), 3441, (2019),DOI:10.3390/s19153441

(3) 光成 勇樹, 長谷川 義大, 谷口 和弘, 松島 充代子, 川部 勤, 式田 光宏, 口元気流計測による乳幼児の呼吸心拍一括評価を目指した気管内挿管チューブ実装型流量センサシステムに関する研究, 電気学会論文誌E, Vol. 139, No. 7, pp.186-194, (2019), DOI:10.1541/ieejsmas.139.186

(2) A. Kato, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, A micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement, Japanese Journal of Applied Physics, 58, SDDL07, (2019), DOI:10.7567/1347-4065/ab0dec

(1) Y. Maeda, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Energy-less respiration monitoring device using thermo-sensitive film, Microsystem Technologies, (2019), DOI:10.1007/s00542-019-04482-4

国際会議(International Conference)

(9) H. Noma, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Development of stent flow sensor device evaluating breathing property at airway in experimental animal under free move condition, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Vancouver, Canada, Jan.(2020), pp.630-633., 18-22 Jan, 2020

(8) Y. Kawamoto, Y. Hasegawa, K. Taniguchi, M. Shikida, Development of Thermal Flow Sensor for Respiration Measurement, Proceedings of 32nd International Microprocesses and Nanotechnology Conference (MNC2019), Hiroshima, Japan, 28-31 Oct, 2019, 31P-8-36L.

(7) H. Yoshida, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Development of Breathing Monitoring System for Artificial Ventilator in Animal Experiment, Proceedings of 32nd International Microprocesses and Nanotechnology Conference (MNC2019), Hiroshima, Japan, 28-31 Oct, 2019, 30D-4-3.

(6) H. Noma, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Flow sensor and stent integration for evaluating in-situ breathing property at airway in experimental animal, Tech. Dig. of 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sep. (2019), PC58.

(5) C. Shimohira, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Thermal flow sensor operated under 40 degrees Celsius for controlling small dosing rate in drip infusion system, Tech. Dig. of 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sep. (2019), PC65.

(4) A. Kato, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, A thermal flow sensor and its signal processing circuit integration onto flexible copper on polyimide substrate, Tech. Dig. of 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sep. (2019), PC62.

(3) Y. Maeda, C. Okihara, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Micro-machined catheter sensor systematization for in-situ breathing and optical imaging measurements in bronchus region in lung system, Tech. Dig. of 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Germany, Jun. (2019), pp.2247-2250.

(2) M. Sakamoto, Y. Hasegawa, K. Taniguchi, M. Shikida, Four-sided Tip-separable Micro-Needle device with large barb formed by anisotropic wet etching for trans-dermal drug delivery system, Tech. Dig. of 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Germany, Jun. (2019), pp.1760-1763.

(1) R. Takigawa, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Integration of MEMS flow sensor, electrical wiring, and tube structure onto copper polyimide substrate, Tech. Dig. of 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Germany, Jun. (2019), pp.1631-1633.

学術論文(Journal paper)

(5) T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Body temperature measurement based on breathing airflow for continuous monitoring of patient body condition during large scale disasters, Microsystem Technologies, (2018), DOI:10.1007/s00542-019-04349-8

(4) K. Taniguchi, M. Kurosawa, Y. Kimura, A. Nishikawa, A Basic Study for Estimation of Occlusal Force using an Ear Wearable Sensor, Electronics and Communications in Japan, (2018), DOI: 10.1002/ecj.12120.

(3) K. Taniguchi, A. Nishikawa, Mouthwitch: A Novel Head Mount Type Hands-Free Input Device that Uses the Movement of the Temple to Control a Camera, Sensors, 18(7), 2273, (2018), DOI:10.3390/s18072273

(2) Y. Hasegawa, Y. Mitsunari, H. Kawaoka, M. Matsushima, T. Kawabe, M. Shikida, Analysis of measurement conditions for detecting change in vital signs with catheter flow sensor, Journal of Micromechanics and Microengineering, (2018), DOI: 10.1088/1361-6439/aad303.

(1) 谷口和弘, 黒澤真美, 木村穣, 西川敦, 外耳装着型センサを用いた咬合力推定のための基礎検討, 電気学会論文誌C(電子・情報・システム部門誌), 138, 6, pp. 1648-654, (2018),DOI: 10.1541/ieejeiss.138.648

国際会議(International Conference)

(7) A. Kato, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Micro-Machined Flow Sensor Formed on Copper on Polyimide Substrate and Its Respiration Measurement Application, Proceedings of 31st International Microprocesses and Nanotechnology Conference (MNC2018), Sapporo, Japan, 13-16 Nov, 2018, 15P-7-90.

(6) Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Three Layered Tube Type Flow Sensor For Human Respiration Measurement, Proceedings of 31st International Microprocesses and Nanotechnology Conference (MNC2018), Sapporo, Japan, 13-16 Nov, 2018, 14B-3-5.

(5) Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, MEMS Flow Sensor Integration into Tracheal Tube Device and its Application to Respiration and Heartbeat Signal Detection in Infant, Proceedings of APCOT2018, 香港, June. (2018)

(4) A. Kato, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Integration Of Temperature Compensation Sensor With Flexible Flow Sensor Based On Cu On Polyimide Substrate, Proceedings of APCOT2018, 香港, June. (2018)

(3) Y. Hasegawa, Y. Yasuda, K. Taniguchi, M. Shikida, Metal plastic forming by mechanical Si structure indentation for producing metal mold master applied for high density needle fabrication, Proceedings of APCOT2018, 香港, June. (2018)

(2) T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Integration of temperature sensor onto MEMS flow sensor for detecting both breathing and body temperature information, Proceedings of APCOT2018, 香港, June. (2018)

(1) Y. Maeda, Y. Hasegawa, K. Taniguchi, M. Matsushima, T. Kawabe, M. Shikida, Breathing monitoring by energy-less respiration sensor based on thermo-sensitive film, Proceedings of APCOT2018, 香港, June. (2018)

学術論文(Journal paper)

(8) K. Taniguchi, H. Kondo, M. Kurosawa, A. Nishikawa, Earable TEMPO: A Novel, Hands-Free Input Device that Uses the Movement of the Tongue Measured with a Wearable Ear Sensor, Sensors, 18(3), 733, (2018), DOI:10.3390/s18030733

(7) Y. Hasegawa, H. Kawaoka, Y. Mitsunari, M. Matsushima, T. Kawabe, M. Shikida, Catheter type thermal flow sensor with small footprint for measuring breathing function, Microsystem Technologies, pp. 1-11, (2018), DOI: 10.1007/s00542-018-3748-y

(6) K. Taniguchi, H. Kondo, T. Tanaka, A. Nishikawa, Earable RCC: Development of an Earphone-Type Reliable Chewing-Count Measurement Device, Journal of Healthcare Engineering, Volume 2018, Article ID 6161525, 8 pages, (2018), DOI: 10.1155/2018/6161525

(5) C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of tube flow sensor by using film transfer technology and its application to in situ breathing and surface image evaluation in airways, Microsystem Technologies, pp. 1-8, (2018), DOI: 10.1007/s00542-018-3733-5

(4) Y. Hasegawa, H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida, Respiration and Heartbeat Signal Detection from Airflow at Airway in Rat by Catheter Flow Sensor with Temparature Compensation Function, Journal of Micromechanics and Microengineering, vol.27, 12, (2017), DOI: 10.1088/1361-6439/aa9595.

(3) Y. Hasegawa, C. Okihara, T. Yamada, K. Komatsubara, K. Iwano, Y. Sakai, M. Shikida, Smooth-surfaced flexible wall shear stress sensor fabricated by film transfer technology, Sensors & Actuators: A. Physical, (2017), DOI: 10.1016/j.sna.2017.08.016

(2) M. Shikida, P. Kim, S. Shibata, Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor, Microsystem Technologies, Vol. 23, No.8, pp. 3547-3558, (2017), DOI: 10.1007/s00542-016-3168-9

(1) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Heartbeat Signal Detection From Analysis of Airflow in Rat Airway Under Different Depths of Anaesthesia Conditions, IEEE Sensors Journal, Vol. 17, Issue.14, pp. 4369-4377, July 15, (2017), DOI:10.1109/JSEN.2017.2707594

国際会議(International Conference)

(9) Y. Tsuchiya, Y. Feng, C. Giotis, N. Harada, M. Shikida, C. Dupre, E. Ollier, F. A. Hassani, H. Mizuta, Characteristics resonance features of SOI-CMOS-compatible silicon nanoelectromechanically doubly-clamped beams up to 330 MHz, Tech. Dig. of IEEE Micro Electro Mechanical Systems

(8) M. Kurosawa,K. Taniguchi,A. Nishikawa, earable: Wearable ear computer, Proceedings of the 2017 International Conference for Top and Emerging Computer Scientistsa, abstract ID No. 12, Taipei,Taiwan, Dec. (2017).

(7) M. Kurosawa,K. Taniguchi,A. Nishikawa, A Basic Study of Measurement of Occlusal Force Using an Ear Wearable Sensor, Proceedings of the 14th international conference on U-healthcare2017, p.85, Seoul,Korea, Dec. (2017).

(6) Y. Tsuchiya, N. Harada, C. Giotis, J. Lamb, F. Arab Hassani, M. Shikida, C. Dupre, E. Ollier, S. T. Bartsch, A. M. Ionescu, H. Mizuta, RF characterization of CMOS-compatible Silicon-on-Insulator Nanoelectromechanical Resonators, Proc. MNE2017, Braga, Portugal, 18-22 Sep. 2017.

(5) Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Small-Footprint Thermal Sensor Detecting Airflow at Mouth in Baby, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040359

(4) T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Catheter Flow Sensor for Breathing Measurements at Different Levels of Tracheobronchial Airway, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040356

(3) S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Micromachined Tube Type Thermal Flow Sensor for Adult-Sized Tracheal Intubation Tube, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040357

(2) Y. Nabekura, H. Fukuyu, Y. Hasegawa, M. Shikida, Fabrication of Sharp Tip-Separable Microneedle Device for Trans-Dermal Drug Delivery Systems, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040304

(1) C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Integration of flow sensor and optical fiberscope for in-situ breathing and surface image evaluations in small airway, Tech. Dig. of 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Kaohsiung, Taiwan, Jun. (2017), pp.1692-1695.

学術論文(Journal paper)

(6) M. Shikida, Y. Niimi, S. Shibata, Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application, Microsystem Technologies, Vol. 23, No.3, pp. 677-685, (2017), DOI 10.1007/s00542-015-2704-3

(5) K.Taniguchi, H. Chiaki, M. Kurosawa, A. Nishikawa, A Novel Earphone Type Sensor for Measuring Mealtime: Consideration of the Method to Distinguish between Running and Meals, Sensors, 17(2), 252, (2017), DOI 10.3390/s17020252

(4) N. Harada, Y. Hasegawa, R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Characterization of basket-forceps micro-flow-sensor for breathing measurements in small airway, Microsystem Technologies, (2017), DOI 10.1007/s00542-016-3265-9

(3) M. Shikida, T. Matsuyama, T. Yamada, M. Matsushima, T. Kawabe, Development of implantable catheter flow sensor into inside of bronchi for laboratory animal, Microsystem Technologies, Vol. 23, No.1, pp. 175-185, (2017), DOI: 10.1007/s00542-015-2663-8

(2) K. Imaeda, K. Bessho, M. Shikida, Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching, Microsystem Technologies, Vol. 22, No.12, pp. 2801-2809, (2016), DOI 10.1007/s00542-015-2590-8

(1) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy, Microsystem Technologies, Vol. 22, No.6, pp.1181-1188, (2016), DOI: 10.1007/s00542-015-2807-x

国際会議(International Conference)

(10) M. Kurosawa, K. Taniguchi, A. Nishikawa, Earable: A Novel Earphone-type Wearable Sensor and Its Applications, The 5th Annual Conference of AnalytiX-2017, Fukuoka, Japan, 22-24 Mar, 2017, Session 7-4.

(9) H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe and M.Shikida, Breathing Signal Analysis of Mouse during Drug Inhalation, Proceedings of 29th International Microprocesses and Nanotechnology Conference (MNC2016), Kyoto, Japan, 8-11 Nov, 2016, 11D-10-3.

(8) Y. Hasegawa, N. Harada, M. Matsushima, T. Kawabe and M.Shikida, Effect of Guide Tube Length on Sensor Output in Inspired Airflow Measurement, Proceedings of 29th International Microprocesses and Nanotechnology Conference (MNC2016), Kyoto, Japan, 8-11 Nov, 2016, 11D-10-4.

(7) Y. Nabekura, Y. Hasegawa, M. Shikida, Embedded wire-electrode into biodegradable micro needle device for brain-machine interface, Proceedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-2-59.

(6) H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Measurement of heartbeat signals from airflow at mouth in rat by catheter flow sensor, Proceedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-6-207.

(5) C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of cylinder hollow structure with flow sensor by film transfer technology, Proceedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-6-213.

(4) S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Response Time Shortening in Thermal Catheter Flow Sensor, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1114)

(3) Y. Nabekura, K. Imaeda, Y. Hasegawa, M. Shikida, Insertion of Tip-separable Microneedle Device for Trans-dermal Drug Delivery Systems, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1115)

(2) C. Okihara, Y. Hasegawa, M. Shikida, Smooth Surfaced Shear Stress Sensor with High Time Resolution, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1116)

(1) N. Harada, R. Ono, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Micro flow sensor integration onto basket forceps for pulmonary function evaluation, Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016, C1L-A-3 (#1194)

学術論文(Journal paper)

(1) T. Ando, M. Shikida, K. Sato, Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator, Sensors and Materials, Vol. 28, No.2, pp. 113-120, (2016), DOI: 10.18494/SAM.2016.1161

国際会議(International Conference)

(9) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Detection of kinetic heartbeat signals from airflow at mouth by catheter flow sensor with temperature compensation, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Shanghai, China, Jan.(2016), pp.359-362.

(8) Y. Hasegawa, T. Yamada, M. Shikida, Fabrication of smooth-surfaced flexible thermal sensor for detecting wall shear stress, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Shanghai, China, Jan. (2016), pp.1010-1013.

(7) (invited)M. Shikida, Development of micro-needles based on MEMS technologies for trans-dermal drug delivery system, Proceedings of IEEE NANOMED 2015, Hawaii, USA, Nov. (2015)

(6) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Extraction of heartbeat signal from airflow at mouth by flow sensor, Proceedings of IEEE SENSORS 2015, Busan, Korea, Nov. (2015), pp.279-282.

(5) K. Imaeda, S. Shibata, M. Matsushima, T. Kawabe, M. Shikida, Responsible time shorting of flexible thermal flow sensor for medical application, Proceedings of IEEE SENSORS 2015, Busan, Korea, Nov. (2015), pp.283-286.

(4) K. Imaeda, K. Bessho, M. Shikida, Sharp tip-separable microneedles device for trans-dermal drug delivery systems, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1715-1718.

(3) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida, Detection of both heartbeat and respiration signals from airflow at mouth by single catheter flow sensor, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1755-1758.

(2) N. Harada, R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Basket forceps with flow sensor for evaluating breathing characteristics in small airway, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1743-1746.

(1) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy, JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE), Kobe International Conference Center, Kobe, Japan, June, (2015), TuB-1-1.

学術論文(Journal paper)

(10) M. Shikida, Y. Niimi, T. Hasegawa, T. Sugino , S. Hamaoka, K. Fukuzawa, Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM, Microsystem Technologies, 21, pp. 661-668, (2015), DOI: 10.1007/s00542-014-2075-1.

(9)J. IL Lee, M. Shikida, K. Sato, Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer, Microsystem Technologies, 21, pp. 239-246, (2015), DOI: 10.1007/s00542-013-1961-2.

(8) M. Shikida, S. Kitamura, C. Miyake, K. Bessho, Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability, Microsystem Technologies, 20, pp. 2239-2245, (2014) DOI: 10.1007/s00542-013-1924-7

(7) T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor, Journal of Fluid Science and Technology, vol. 9, 3, pp.1-13, (2014).

(6) T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet, Journal of Japanese Society for Experimental Mechanics, Vol. 14 (2014), s13-s18 (6 pages). (ISEM 2013 特集号)

(5) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Lateral-Deflection-Controlled Friction Force Microscopy, Journal of Applied Physics, 116, 084311 (2014)

(4) J. IL Lee, H. Shin, M. Shikida, K. Sato, Structural design of polymer-based tactile sensor with table-shaped sensing pad, Microelectronic Engineering, Vol.127, 5 September (2014), pp. 1?6

(3) M. Shikida, K. Yoshikawa, T. Matsuyama, Y. Yamazaki, M. Matsushima, T. Kawabe, Catheter flow sensor with temperature compensation for tracheal intubation tube system, Sensors and Actuators A, pp. 155-160, (2014), DOI: 10.1016/j.sna.2013.08.004

(2) 松山拓矢, 山﨑雄大, 松島充代子, 川部勤, 式田光宏, 呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発, 電気学会論文誌E(センサ・マイクロマシン部門誌), 134, 6, pp. 126-131, (2014).,DOI: 10.1541/ieejsmas.134.126

(1) M. Mizoshiri, M. Mikami, K. Ozaki, M. Shikida, S. Hata, Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method, Applied Physics Express, 7, 057101 (2014)

国際会議(International Conference)

(10) P. Kim, S. Shibata, M. Shikida, Vacuum cavity formation for high thermal isolation in flexible thermal sensor, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Estoril, Portugal, Jan. (2015), pp.845-848.

(9) S. Muramatsu, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, Measurement of wall shear stress in a boundary layer of a turbulent wall jet with two types of MEMS sensors, The 5th International conference on Mechanical Engineering, December 17-19, Chiang Mai, Thailand, (2014)

(8) R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Wearable displacement sensor system based on elevating tube for measuring breathing pattern, Proceedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 1161-1164.

(7) K. Imaeda, K. Bessho, M. Shikida, Sharp needle tip formation based on triangular pyramidal structure, Proceedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 558-561.

(6) S. Shibata, Y. Niimi, M. Shikida, Flexible thermal MEMS flow sensor based on Cu on polyimide substrate, Proceedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 424-427.

(5) T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida, Implantable catheter flow sensor with legs in air passage for laboratory animal, Proceedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 253-256.

(4) K. Imaeda, K. Bessho, C. Miyake, M. Shikida, Penetration capability of pyramidal shaped micro-needles into skin, Tech. Dig. of Asia-Paciific Conference on Transducers and Micro-Nano Technology, Daegu, Korea, June-July, (2014), p. P2-7.

(3) T. Yamada, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida, Micromachined catheter flow sensor for measurement of breathing characteristics in a bronchial region, Tech. Dig. of Asia-Paciific Conference on Transducers and Micro-Nano Technology, Daegu, Korea, June-July, (2014), p. P2-6.

(2) S. Arakane, M. Mizoshiri, T. Maetani, M. Shikida, S. Hata, Direct reduction of copper nanoparticles using femtosecond laser pulses copper micropattern, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, ICMP2014, June 9-13, 2014, Detroit, Michigan, USA

(1) M. Mizoshiri, M. Mikami, K. Ozaki, M. Shikida, S. Hata, The effect of metal buffer layers on open-circuit voltage of thin-film thermoelectric modules, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, ICMP2014, June 9-13, 2014, Detroit, Michigan, USA