論文掲載：IEEE Sensors Journal

M. S. Al Farisi, Y. Hasegawa, M. Shikida, Response Time Suppression in Flexible MEMS Thermal Sensor by Backside Laser Ablation, IEEE Sensors Journal, Vol. 25, No. 23, pp. 42581–42588 (2025). DOI: 10.1109/JSEN.2025.3622312 (Preprint: TechRxiv:176127379.93016845)