論文掲載：Sensors and Actuators A: Physical

M. N. Mohamed Zukri, M. S. Al Farisi, Y. Hasegawa, M. Shikida, Single-step laser patterning and thinning of biocompatible MEMS flow sensor, Sensors and Actuators A: Physical, in press (2026). DOI: 10.1016/j.sna.2025.117377 (Preprint: arXiv:2512.08128)